Lectures and laboratory on semiconductor-based processing for MEMS. Description of key equipment and characterization tools used for MEMS and design, fabrication, characterization and testing of MEMS. Emphasis on current MEMS devices including accelerometers, comb drives, micro-reactors and capacitor-actuators.

Prerequisites: ME 141A, ME 163 (may be concurrent); or ECE 141A.

4

Units

Letter

Grading

1, 2, 3

Passtime

None

Level Limit

Engineering

College
PENNATHUR S
Sumita Pennathur
4.1
9 reviews
Spring 2024 . Pennathur S
ENGR22243
T R
15:30 PM - 16:45 PM
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ME 141B Pennathur S Spring 2023 Total: 5
ME 141B Pennathur S Spring 2022 Total: 6
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9
4.1
ME152A . Pennathur S 9 Years Ago

Such a nice lady. She genuinely wants you to learn everything and bends over backwards to make sure you learn it. I've never had a professor this committed to teaching.

0 helpful 0 unhelpful
ME 152B . Pennathur S 9 Years Ago

Pros: Nice/ not boring/ enthusiastic/ FAT curve Cons: Poor lectures, writes an equation and side tracks with some random story. The homework is very hard/long and lectures don't help you much with understanding the material. Download a fluids textbook and study it hard if you want to do well on the tests

1 helpful 0 unhelpful
ME152B . Pennathur S 11 Years Ago

Very nice person, very helpful. Makes herself very accessible inside and outside of office hrs. Wants you to succeed. Pretty awful lecturer though, and confuses people (only to clear up said confusion later by smothering you with assistance). homework is tough, but thought-provoking. Tests are reasonable. Final was hard.

0 helpful 0 unhelpful
ECE141A . Pennathur S 12 Years Ago

She is really devoted to the subject and is good at making you excited about it, but the lectures are quite stressed and often based on the idea "you should already know this...". The homework is extensive and too often just about finding the right formula (not too rewarding). If you're interested in the field and don't have a too pressing schedule

0 helpful 0 unhelpful
ME151B . Pennathur S 12 Years Ago

Good professor, great person. She learns everyone's name the first day and interfaces the class with facebook. Her lectures are clear and she is happy to clear up any confusion. She is willing to sacrifice her time to help you whenever you need it.

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ME152B . Pennathur S 15 Years Ago

I hated this class at first because the homework is very long and difficult. She is very passionate about her work and she wants everyone to get an A+. Just work in groups and study the homework, practice exams and read the book before going into the exams. Get familiar with Navier Stokes.

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See all 9 reviews
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