ME 141B - MEMS: Processing and Device Characterization

Lectures and laboratory on semiconductor-based processing for MEMS. Description of key equipment and characterization tools used for MEMS and design, fabrication, characterization and testing of MEMS. Emphasis on current MEMS devices including accelerometers, comb drives, micro-reactors and capacitor-actuators.

Prerequisites: ME 141A or ECE 141A.

ME 141B

8 / 20 Enrolled

MEMS: Processing and Device Characterization

Sumita Pennathur 4.1

T R

11:00 AM - 12:15 PM

69.5% A