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  • ECE
  • ECE 141B

    • MEMS: Processing and Device Characterization . ECE 141B

    Lectures and laboratory on semiconductor-based processing for MEMS. Description of key equipment and characterization tools used for MEMS and design, fabrication, characterization and testing of MEMS Emphasis on current MEMS devices including accelerometers, comb drives, micro-reactors and capacitor-actuators.

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    Prerequisites: ME 141A, ME 163 (may be concurrent); or ECE 141A.

    4

    Units

    Letter

    Grading

    1, 2, 3

    Passtime

    None

    Level Limit

    Engineering

    College
    Instructors
    PENNATHUR S
    No info found
    Lecture
    ILP 3101
    T R
    15:30 PM - 16:45 PM
    4 / 5
    Enrollment Trends
    Past Enrollment Trends (1)
    Spring 2024 . T B A
    T R
    15:30 PM - 16:45 PM
    Grading Trends (2)
    ECE 141B Pennathur S Spring 2013 Total: 5
    ECE 141B Pennathur S Fall 2010 Total: 5
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