Explores the intersection of functional materials and advanced device engineering in the context of nano- and micro-electro-mechanical systems. Students examine the properties and structures of 0D, 1D, and 2D materials—including quantum dots, nanowires, nanotubes, and thin films—and learn how these materials are leveraged in the design, fabrication, and functionalization of N/MEMS devices. Emphasis is placed on understanding how quantum effects and material characteristics influence the performance of sensors, actuators, and other micro/nano-scale components.