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  • ECE 141B

    • MEMS: Processing and Device Characterization . ECE 141B

    Lectures and laboratory on semiconductor-based processing for MEMS. Description of key equipment and characterization tools used for MEMS and design, fabrication, characterization and testing of MEMS. Emphasis on current MEMS devices including accelerometers, comb drives, micro-reactors and capacitor-actuators.

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    Prerequisites: ME 141A or ECE 141A.

    4

    Units

    Letter

    Grading

    1, 2, 3

    Passtime

    None

    Level Limit

    Engineering

    College
    Instructors
    T B A
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    Lecture
    ILP 3205
    T R
    11:00 AM - 12:15 PM
    0 / 10
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