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Lectures and laboratory on semiconductor-based processing for MEMS. Description of key equipment and characterization tools used for MEMS and design, fabrication, characterization and testing of MEMS. Emphasis on current MEMS devices including accelerometers, comb drives, micro-reactors and capacitor-actuators.

Prerequisites: ME 141A or ECE 141A.

4

Units

Letter

Grading

1, 2, 3

Passtime

None

Level Limit

Engineering

College
PENNATHUR S
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